JPH0257354B2 - - Google Patents

Info

Publication number
JPH0257354B2
JPH0257354B2 JP61141656A JP14165686A JPH0257354B2 JP H0257354 B2 JPH0257354 B2 JP H0257354B2 JP 61141656 A JP61141656 A JP 61141656A JP 14165686 A JP14165686 A JP 14165686A JP H0257354 B2 JPH0257354 B2 JP H0257354B2
Authority
JP
Japan
Prior art keywords
piezoelectric
piezoelectric ceramic
plate
actuator
ceramics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61141656A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62298190A (ja
Inventor
Hiromitsu Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Special Metals Co Ltd filed Critical Sumitomo Special Metals Co Ltd
Priority to JP61141656A priority Critical patent/JPS62298190A/ja
Publication of JPS62298190A publication Critical patent/JPS62298190A/ja
Publication of JPH0257354B2 publication Critical patent/JPH0257354B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP61141656A 1986-06-18 1986-06-18 圧電アクチユエ−タ Granted JPS62298190A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61141656A JPS62298190A (ja) 1986-06-18 1986-06-18 圧電アクチユエ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61141656A JPS62298190A (ja) 1986-06-18 1986-06-18 圧電アクチユエ−タ

Publications (2)

Publication Number Publication Date
JPS62298190A JPS62298190A (ja) 1987-12-25
JPH0257354B2 true JPH0257354B2 (en]) 1990-12-04

Family

ID=15297117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61141656A Granted JPS62298190A (ja) 1986-06-18 1986-06-18 圧電アクチユエ−タ

Country Status (1)

Country Link
JP (1) JPS62298190A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0262637B1 (en) * 1986-09-29 1995-03-22 Mitsubishi Chemical Corporation Piezoelectric actuator
JP2886588B2 (ja) * 1989-07-11 1999-04-26 日本碍子株式会社 圧電／電歪アクチュエータ
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
EP0526048B1 (en) * 1991-07-18 1997-11-12 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia
JP5532617B2 (ja) * 2009-01-30 2014-06-25 株式会社村田製作所 圧電アクチュエータ

Also Published As

Publication number Publication date
JPS62298190A (ja) 1987-12-25

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